reflection microscopy of integrated circuit
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Always something new when you run a core facility… There’s a lab on my campus that works with CCD chips
to make cameras for big telescopes. Since they do their own backthinning,
they want to inspect the chips. They approached me about doing reflection
mode confocal. The person I’m working with has a degree in optics,
which has made the training easy. My problem is that I’m a
biologist, not a materials science person, and other than some quick
instructions on how to set up the Zeiss LSM 510 for reflection mode, I really
feel at a loss. We did some imaging today and I’m not sure how to
interpret what we’re seeing. What should be slight
“bumps” look more like “pits”. Also, I’m
seeing what looks like (for lack of a correct technical term) linear diffraction
from the chip surface. In fact, when you looked at some of our
“pits” from the side, they looked a lot like the top half of a PSF. Is there anyone out there with some experience with this
type of sample that could give me a few pointers? If there’s a
review article you can refer me to, that would be great too. Thanks. Enjoy Pi Day tomorrow (3.14)! Doug ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ Douglas W. Cromey, M.S. - Assistant Scientific Investigator Dept. of Cell Biology & Anatomy, University of Arizona 1501 N. Campbell Ave, Tucson, AZ 85724-5044 USA office: AHSC 4212 email: [hidden email] voice: 520-626-2824 fax: 520-626-2097 http://swehsc.pharmacy.arizona.edu/exppath/ Home of: "Microscopy and Imaging Resources on the
WWW" |
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I’ve only had one response and I
could really use some help. Thanks. Doug From: Confocal Microscopy
List [mailto:[hidden email]] On Behalf Of [hidden email] Always something new when you run a core facility… There’s a lab on my campus that works with CCD chips to make
cameras for big telescopes. Since they do their own backthinning, they
want to inspect the chips. They approached me about doing reflection mode
confocal. The person I’m working with has a degree in optics, which has
made the training easy. My problem is that I’m a biologist, not a materials
science person, and other than some quick instructions on how to set up the
Zeiss LSM 510 for reflection mode, I really feel at a loss. We did some imaging today and I’m not sure how to interpret
what we’re seeing. What should be slight “bumps” look more like
“pits”. Also, I’m seeing what looks like (for lack of a correct technical
term) linear diffraction from the chip surface. In fact, when you looked
at some of our “pits” from the side, they looked a lot like the top half of a
PSF. Is there anyone out there with some experience with this
type of sample that could give me a few pointers? If there’s a review
article you can refer me to, that would be great too. Thanks. Enjoy Pi Day tomorrow (3.14)! Doug ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ Douglas W. Cromey, M.S. - Assistant Scientific Investigator Dept. of Cell Biology & Anatomy, University of Arizona 1501 N. Campbell Ave, Tucson, AZ 85724-5044 USA office: AHSC
4212 email: [hidden email] voice: 520-626-2824
fax: 520-626-2097 http://swehsc.pharmacy.arizona.edu/exppath/ Home of: "Microscopy and Imaging Resources on the
WWW" |
 
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Shalin Mehta |
Re: reflection microscopy of integrated circuit
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Hi Doug,
I have never worked with such samples, but read some papers. I shall send them to you off list. At visible wavelengths the silicon acts as a nearly perfect reflector. Therefore, one would expect that when you acquire a z-stack you get pixel-data which is convolution of the PSF and the true surface profile. Out of curiosity, can you see anything beneath the surface? You may suspect that the light-path (e.g. pinhole location) is not perfectly aligned and hence giving artifacts. If the z-stack doesn't seem to show true surface profile and appears artifactual, you might want to put a mirror on the stage and take a z-stack. If light-path is aligned properly it should give you strong single peak when the objective is focused exactly at the surface of the chip. Best Shalin On Wed, Mar 18, 2009 at 10:37 PM, <[hidden email]> wrote:
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Tim Holmes-2 |
Re: reflection microscopy of integrated circuit
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In reply to this post by cromey
Ch. 8 by P.C. Cheng in the
Handbook of Biological Confocal Microscopy, 3rd Ed. (J. Pawley –
Springer) covers effects that could explain the “pits” you are seeing.
The 2nd Edition of this book has a similar chapter and explanation.
It sounds to me like the effect described in Fig. 8.8, which shows how
reflections are modulated by oblique sections of surfaces. The cone of
reflection goes off at an angle and only a piece of the cone comes back through
the lens. You should see the picture in the book, which shows the effect
much clearer than I could describe in words. From: Confocal Microscopy
List [mailto:[hidden email]] On Behalf Of [hidden email] I’ve only had one response
and I could really use some help. Thanks. Doug From: Confocal Microscopy
List [mailto:[hidden email]] On Behalf Of [hidden email] Always something new when you run a core facility… There’s a lab on my campus that works with CCD chips
to make cameras for big telescopes. Since they do their own backthinning,
they want to inspect the chips. They approached me about doing reflection
mode confocal. The person I’m working with has a degree in optics,
which has made the training easy. My problem is that I’m a
biologist, not a materials science person, and other than some quick
instructions on how to set up the Zeiss LSM 510 for reflection mode, I really
feel at a loss. We did some imaging today and I’m not sure how to interpret
what we’re seeing. What should be slight “bumps” look
more like “pits”. Also, I’m seeing what looks like (for
lack of a correct technical term) linear diffraction from the chip
surface. In fact, when you looked at some of our “pits” from
the side, they looked a lot like the top half of a PSF. Is there anyone out there with some experience with this
type of sample that could give me a few pointers? If there’s a
review article you can refer me to, that would be great too. Thanks. Enjoy Pi Day tomorrow (3.14)! Doug ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ Douglas W. Cromey, M.S. - Assistant Scientific Investigator Dept. of Cell Biology & Anatomy, University of Arizona 1501 N. Campbell Ave, Tucson, AZ 85724-5044 USA office: AHSC
4212 email: [hidden email] voice:
520-626-2824 fax: 520-626-2097 http://swehsc.pharmacy.arizona.edu/exppath/ Home of: "Microscopy and Imaging Resources on the
WWW" No virus
found in this incoming message. |
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