I’ve only had one response and I
could really use some help.
Thanks.
Doug
From: Confocal Microscopy
List [mailto:[hidden email]] On Behalf Of [hidden email]
Sent: Friday, March 13, 2009 3:32 PM
To: [hidden email]
Subject: reflection microscopy of integrated circuit
Always something new when you run a core facility…
There’s a lab on my campus that works with CCD chips to make
cameras for big telescopes. Since they do their own backthinning, they
want to inspect the chips. They approached me about doing reflection mode
confocal. The person I’m working with has a degree in optics, which has
made the training easy. My problem is that I’m a biologist, not a materials
science person, and other than some quick instructions on how to set up the
Zeiss LSM 510 for reflection mode, I really feel at a loss.
We did some imaging today and I’m not sure how to interpret
what we’re seeing. What should be slight “bumps” look more like
“pits”. Also, I’m seeing what looks like (for lack of a correct technical
term) linear diffraction from the chip surface. In fact, when you looked
at some of our “pits” from the side, they looked a lot like the top half of a
PSF.
Is there anyone out there with some experience with this
type of sample that could give me a few pointers? If there’s a review
article you can refer me to, that would be great too.
Thanks. Enjoy Pi Day tomorrow (3.14)!
Doug
^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
Douglas W. Cromey, M.S. - Assistant Scientific Investigator
Dept. of Cell Biology & Anatomy, University of Arizona
1501 N. Campbell Ave, Tucson, AZ 85724-5044 USA
office: AHSC
4212 email: [hidden email]
voice: 520-626-2824
fax: 520-626-2097
http://swehsc.pharmacy.arizona.edu/exppath/
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