Ch. 8 by P.C. Cheng in the
Handbook of Biological Confocal Microscopy, 3rd Ed. (J. Pawley –
Springer) covers effects that could explain the “pits” you are seeing.
The 2nd Edition of this book has a similar chapter and explanation.
It sounds to me like the effect described in Fig. 8.8, which shows how
reflections are modulated by oblique sections of surfaces. The cone of
reflection goes off at an angle and only a piece of the cone comes back through
the lens. You should see the picture in the book, which shows the effect
much clearer than I could describe in words.
From: Confocal Microscopy
List [mailto:[hidden email]] On Behalf Of [hidden email]
Sent: Wednesday, March 18, 2009 9:38 AM
To: [hidden email]
Subject: Re: reflection microscopy of integrated circuit
I’ve only had one response
and I could really use some help.
Thanks.
Doug
From: Confocal Microscopy
List [mailto:[hidden email]] On Behalf Of [hidden email]
Sent: Friday, March 13, 2009 3:32 PM
To: [hidden email]
Subject: reflection microscopy of integrated circuit
Always something new when you run a core facility…
There’s a lab on my campus that works with CCD chips
to make cameras for big telescopes. Since they do their own backthinning,
they want to inspect the chips. They approached me about doing reflection
mode confocal. The person I’m working with has a degree in optics,
which has made the training easy. My problem is that I’m a
biologist, not a materials science person, and other than some quick
instructions on how to set up the Zeiss LSM 510 for reflection mode, I really
feel at a loss.
We did some imaging today and I’m not sure how to interpret
what we’re seeing. What should be slight “bumps” look
more like “pits”. Also, I’m seeing what looks like (for
lack of a correct technical term) linear diffraction from the chip
surface. In fact, when you looked at some of our “pits” from
the side, they looked a lot like the top half of a PSF.
Is there anyone out there with some experience with this
type of sample that could give me a few pointers? If there’s a
review article you can refer me to, that would be great too.
Thanks. Enjoy Pi Day tomorrow (3.14)!
Doug
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Douglas W. Cromey, M.S. - Assistant Scientific Investigator
Dept. of Cell Biology & Anatomy, University of Arizona
1501 N. Campbell Ave, Tucson, AZ 85724-5044 USA
office: AHSC
4212 email: [hidden email]
voice:
520-626-2824 fax: 520-626-2097
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